AMMT Advanced Micromachining Tools GmbH, Frankenthal (HRB 21971)

wet etching benches wet etching wet etch tools wafer plating wafer holder wafer fixture wafer chuck wafer vapour phase etching vapour phase etcher vapour etching vapour etcher vapor phase etching vapor phase etcher vapor etching vapor etcher vacuum wafer chuck vacuum chuck TMAH etching TMAH thinning Tandem6 Tandem4 tandem sticking free release sticking free soi wafer SiO2 SingleEP Single6EC Single6 Single5EC Single5 Single4EC Single4 single sided KOH etching single side etching single chip etching single chip single silicon Silicet resist coating quartz PSB6 PSB4 PSB PS2-24A PS2-12A PS2 PS Power Supply precision machining potentiostat potassium hydroxide porous silicon fabrication porous silicon etching porous silicon PEEK machining PEEK nassaetzanlagen ModelSC microsystems micromachining microfabrication MEMS Potentiostat MEMS MEMES potentiostat macroporous silicon liga holder KOH etching KOH jig isotropic etching isotropic Idonus hydrofluoric acid hydrofluoric hydro fluoric acid hydro fluoric hotplate holder HFVE6 HFVE4 HFVE HF vapor etching HF vapor etcher HF vapor HF etching hf glass etching glass glas galvanostat galvanik galvanic fused silica etching etch-stop etch stop etch engineering elektrochemisch electrostatic chuck electropolishing electroplating electrochemical etch-stop electrochemical etch stop electro phoretic deposition ECES process dicing free release critical point drying chuck chemical handling solutions bulk micromachining belackung backside protection anodization anisotropic etching anisotropic AMMT aetzdose